Cleanroom
Microfabrication projects
Both in research and in undegraduate coureswork I’ve completed many projects in a cleanroom environment. These include building MOSFETS from scratch, growing tri-color images using oxide patterning, and fabricating capacitive and piezoeletric transducers. I’ve used a variety of machines within the cleanroom, including UV lithography (spin coating, alignment, patterning, development, etc), vapor deposition, plasma cleaning, and various optical metrology instruments.
Left, RGB image of Dory built by selectively growing oxide layers on silicon. Middle, micro-scale transducer cavities and drums. Right, pieces of MOSFETS built from scratch.