Cleanroom
Microfabrication projects
Both in research and in undegraduate coureswork I’ve completed many projects in a cleanroom environment. These include building MOSFETS from scratch, growing tri-color images using oxide patterning, and fabricating capacitive and piezoeletric transducers. I’ve used a variety of machines within the cleanroom, including UV lithography (spin coating, alignment, patterning, development, etc), vapor deposition, plasma cleaning, and various optical metrology instruments.
![Dory](/assets/img/oxide_dory.jpg)
![transducers](/assets/img/transducers.jpg)
![MOSFET screenshot](/assets/img/mosfets.jpg)
Left, RGB image of Dory built by selectively growing oxide layers on silicon. Middle, micro-scale transducer cavities and drums. Right, pieces of MOSFETS built from scratch.